Details

High-k Materials in Multi-Gate FET Devices


High-k Materials in Multi-Gate FET Devices


Science, Technology, and Management

von: Shubham Tayal

56,24 €

Verlag: Crc Press
Format: EPUB
Veröffentl.: 16.09.2021
ISBN/EAN: 9781000438819
Sprache: englisch
Anzahl Seiten: 164

DRM-geschütztes eBook, Sie benötigen z.B. Adobe Digital Editions und eine Adobe ID zum Lesen.

Beschreibungen

High-k Materials in Multi-Gate FET Devices focuses on high-k materials for advanced FET devices. It discusses emerging challenges in the engineering and applications and considers issues with associated technologies. It covers the various way of utilizing high-k dielectrics in multi-gate FETs for enhancing their performance at the device as well as circuit level.Provides basic knowledge about FET devices Presents the motivation behind multi-gate FETs, including current and future trends in transistor technologiesDiscusses fabrication and characterization of high-k materialsContains a comprehensive analysis of the impact of high-k dielectrics utilized in the gate-oxide and the gate-sidewall spacers on the GIDL of emerging multi-gate FET architecturesOffers detailed application of high-k materials for advanced FET devicesConsiders future research directionsThis book is of value to researchers in materials science, electronics engineering, semiconductor device modeling, IT, and related disciplines studying nanodevices such as FinFET and Tunnel FET and device-circuit codesign issues.

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